HOME 연구실소개 마이크로기계소자설계연구실

마이크로기계소자설계연구실

마이크로기계소자설계

연구실 소개

본 연구실에서는 마이크로기계전자장치 (Micro-Electro-Mechanical Systems, MEMS)의 설계 및 개발을 목표로 합니다. 초소형 기계가공기술과 반도체 공정 기술을 함께 도입하여, 대량생산 가능한 3차원 소자 제작 방안을 모색합니다. 또한, 마이크로 크기 이하에서 발생하는 힘과 소재 및 구조의 변형을 함께 연구하며 이를 응용하고자 합니다. 더 나아가, 나노소재의 도입을 통해, 기존 연구되고 있던 MEMS 장치의 고질적인 문제점을 해결하고, 장수명, 고신뢰성 소자의 제작/생산을 목표로 합니다. 이러한 제작 및 설계 방법을 활용한 유연기계장치에 대한 연구도 부가적으로 수행하고 있습니다.

연구실 담당교수

인적 사항
  • 직위, 성명 : 교수 조은환
  • 연구실 : 테크노관 520호
  • 전화 : 054-478-7303
  • 이메일 : eunaj@kumoh.ac.kr
  • 연구실 홈페이지 : https://sites.google.com/view/mmddlab/
학위 및 경력
  • 2013 연세대학교 기계공학부 공학사
  • 2020 연세대학교 기계공학과 공학박사
  • 2020.09-2021.08 연세대학교 기계공학과 BK21 Four 사업단 박사후연구원
  • 2021.09-2023.12 연세대학교 기계공학과 BK21 Four 사업단 연구교수
  • 2024-현재 금오공과대학교 조교수
전공분야
  • 미세전자기계 시스템(MEMS)
  • 마이크로 스케일 센서 및 액추에이터
  • 마이크로/나노 규모 제조
  • 나노물질이 집적된 미세전자기계 스위치
  • MEMS에 나노소재 통합
  • 나노구조의 대규모 합성
  • 유연하고 착용 가능한 장치
담당 교과목
  • 고체역학

주요 연구실적

논문
  • E. Jo, Y. Kang, S. Sim, H.Lee, and J, Kim*, “High-Temperature-Operable Electromechanical Computing Units Enabled by Aligned Carbon Nanotube Arrays”, ACS Nano, 17, 13310 (2023).
  • E. Jo+, H.Lee+, J.-I. Lee, and J, Kim*, “Mechanically Resilient, Alumina-Reinforced Carbon Nanotube Arrays for In-Plane Shock Absorption in Micromechanical Devices”, Microsystems & Nanoengineering, 9, 76 (2023).
  • Y. Oh, D.-S. Kwon, E. Jo, Y. Kang, S. Sim, and J. Kim*, “Formation of sub-100-nm suspended nanowires with various materials using thermally adjusted electrospun nanofibers as templates”, Microsystems & Nanoengineering, 9, 15 (2023)
  • S. Lee, Y. Kang, J. Lee, J. Kim, J. W. Shin, S. Sim, D. Go, E. Jo, S. Kye, J. Kim*, and J, Ahn*, “Atomic layer deposited Pt nanoparticles on functionalized MoS2 as highly sensitive H2 sensor”, Applied Surface Science, 571, 151256 (2022).
  • S. Sim, E. Jo, Y. Kang, E. Chung,and J. Kim*, “Highly Sensitive Flexible Tactile Sensors in Wide Sensing Range Enabled by Hierarchical Topography of Biaxially Strained and Capillary‐Densified Carbon Nanotube Bundles”, Small, 17(50), 355602 (2021).
  • Y. Oh, D.S. Kwon, W. Kim, E. Jo, S. Pyo, and J. Kim* “Location-specific fabrication of suspended nanowires using electrospun fibers on designed microstructure”, Nanotehcnology, 32(35), 355602 (2021)
  • E. Jo+, Y.B. Lee+, Y. Jung, S.B. Kim, Y. Kang, M.H. Seo, J.B. Yoon*, and J. Kim*, “Integration of Gold Nanoparticle–Carbon Nanotube Composite for Enhanced Contact Lifetime of Microelectromechanical Switches with Very Low Contact Resistance”, ACS Applied Materials & Interfaces, 13(14), 16959-16967 (2021).
  • Y. Kwak, Y. Kang, W. Park, E. Jo and J. Kim*, “Fabrication of fine-pored polydimethylsiloxane using an isopropyl alcohol and water mixture for adjustable mechanical, optical, and thermal properties”, RSC Advances, 11(29), 18061-18067 (2021).
  • K. Kim, J. Lee, E. Jo, S. Sim, and J. Kim*, “Patterned carbon nanotube bundles as stretchable strain sensors for human motion detection”, ACS Applied Nano Materials, 3(11), 11408-11415 (2020).
  • B. Cho, K. Lee, E. Jo, and J. Kim*. “Detection of Mixed BTEX With Suppressed Reaction Specificity Using Tin Oxide Nanoparticles Functionalized by Multi-Metalloporphyrins”, IEEE Sensors Journal, 19(24), 11791-11796 (2019).
  • S. Pyo, J. Lee, W Kim, E. Jo, and J. Kim*. “Multi‐Layered, Hierarchical Fabric‐Based Tactile Sensors with High Sensitivity and Linearity in Ultrawide Pressure Range”, Advanced Functional Materials, 29(35), 1902484 (2019).
  • Y. Kang, S. Pyo, E. Jo, and J. Kim*. “Light-assisted recovery of reacted MoS2 for reversible NO2 sensing at room temperature”, Nanotechnology, 30(35), 355504 (2019).
  • S. Pyo, K. Lee, T. Noh, E. Jo, and J. Kim*. “Sensitivity enhancement in photoionization detector using microelectrodes with integrated 1D nanostructures” Sensors and Actuators B: Chemical, 288, 618-624 (2019).
  • E. Jo+, M.-H. Seo+, S. Pyo, S.-D. Ko, D.-S. Kwon, J. Choi, J.-B. Yoon*, and J. Kim*. “Integration of a Carbon Nanotube Network on a Microelectromechanical Switch for Ultralong Contact Lifetime”, ACS Applied Materials & Interfaces, 11(20), 18617-18625 (2019).
  • J. Lee, S. Pyo, D.-S. Kwon, E. Jo, W. Kim, and J. Kim*. “Ultrasensitive Strain Sensor Based on Separation of Overlapped Carbon Nanotubes”, Small, 15(12), 1805120 (2019).
국제학술대회
  • H. Lee+, E. Jo+, J.-I. Lee, and J. Kim, “MEMS Shock Absorbers Integrated with Al2O3-Reinforced, Mechanically Resilient Nanotube Arrays”, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS), pp.45-48 (2023), Oral Presentation.
  • S. Sim, K. Bae, Y. Kang, E. Jo, H. Han, and J. Kim, “VERTICALLY-ALIGNED CARBON NANOTUBES-EMBEDDED PDMS MICROSTRUCTURES FOR FLEXIBLE TACTILE SENSOR ARRAY WITH HIGH SENSITIVITY AND DURABILITY”, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), pp.706-709 (2021), Poster Presentation.
  • K. Bae, Y. Kang, E. Jo, S. Sim, W. Yang, and J. Kim, “WASHABLE, INKJET-PRINTED FLEXIBLE TACTILE SENSOR ON FABRIC WITH TEMPERATURE TOLERANCE”, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), pp.79-82 (2021), Oral Presentation.
  • E. Jo, Y. Kang, S. Sim, J. Choi, and J. Kim*, “MICROELECTROMECHANICAL SWITCH WITH CARBON NANOTUBE ARRAYS FOR HIGH-TEMPERATURE OPERATION” 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 574-577 (2020), Poster Presentation.
  • Y. Kwak, E. Jo, Y. Kang, and J. Kim*, “HIGHLY TRANSPARENT POROUS POLYDIMETHYLSILOXANE WITH MICRO-SIZE PORES USING WATER AND ISOPROPANOL MIXTURE” 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 287-290 (2020), Oral Presentation.
  • E. Jo+, Y.-B. Lee+, J. Lee, S.-B. Kim, W. Kim, M.-H. Seo, J.-B. Yoon*, and J. Kim*, “GOLD-DECORATED CARBON NANOTUBE NETWORK AS CONTACT SURFACE OF MEM SWITCH FOR EXTENDED LIFETIME” 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 958-961 (2019), Poster Presentation. (+Equally Contributed Authors).
  • W. Kim+, E. Jo+, J.-I. Lee, and J. Kim*, “MEASUREMENT OF FRICTION FORCE BETWEEN DIRECTLY INTEGRATED CARBON NANOTUBE BUNDLES IN TIP-TO-TIP CONTACT USING MEMS TRIBOMETER PLATFORM” 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 845-848 (2019), Poster Presentation. (+Equally Contributed Authors).
  • J. Lee, S. Pyo, E. Jo, and J. Kim*, “A TEXTILE-BASED RESISTIVE TACTILE SENSOR WITH HIGH SENSITIVITY IN A WIDE PRESSURE RANGE” 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 194-197 (2019), Oral Presentation.
  • J. Lee, S. Pyo, E. Jo, and J. Kim*, “DEVELOPMENT OF A HIGHLY STRETCHABLE STRAIN SENSOR BASED ON PATTERNED AND ROLLED CARBON NANOTUBES” 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), pp. 811-814 (2019), Poster Presentation.
  • M.-H. Seo+, E. Jo+, S.-D. Ko, J. Choi, Y.-H. Yoon, D.-S. Kwon, J. Kim*, and J.-B. Yoon*. “CARBON NANOTUBES NETWORK CONTACT LUBRICATION FOR HIGHLY RELIABLE MEMS SWITCH”, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 5-8 (2017), Oral Presentation.
  • S. Pyo, E. Jo, D.-S. Kwon, W. Kim, W. Chang, and J. Kim*, “FABRICATION OF CARBON NANOTUBE-COATED FABRIC FOR HIGHLY SENSITIVE PRESSURE SENSOR” 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp. 962-965 (2017), Poster Presentation.